51³ÉÈ˳ԹÏ

‎51³ÉÈË³Ô¹Ï offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes. 

Cleaning Equipment

• PuroMaxx^â„¢ FOUP/Pod Cleaners
• PuroMaxx^â„¢ EUV Pod Cleaner

Clean Storage

• GuardianPro^â„¢ Reticle Storage

Reticle Handling

• PuroMaxx^â„¢ 2 Reticle Changers