51³ÉÈ˳ԹÏ

‎51³ÉÈË³Ô¹Ï offers the industry’s cleanest wafer sorter and load ports. The Spartan^â„¢ Sorter delivers industry-leading particle performance along with productivity and serviceability; our 300mm Vision load ports are ultra-clean with reliable and flexible tool interfaces; and our 200mm SMIF load port transfers (LPT) products are the industry’s standard for adaptive SMIF solutions. Additionally, ‎51³ÉÈË³Ô¹Ï offers an innovative near-tool buffer solution to reduce AMHS bottlenecks and increase tool utilization.

Spartan Sorters

• 200mm, 300mm

Load Ports

• Vision^® LEAP^â„¢ 300 Load Port Modules

Reticle Handling

• Narrow Reticle Indexer

SMIF Products

• SMIF Load Port Transfer (LPT)
• SMIF-INX Indexers
• VersaPortâ„¢ 2200 Load Port